In this paper, the effect of lab-made gas mixing unit and inter-electrode distance on, current-voltage
characteristics of argon
and argon-nitrogen plasma, Paschen’s curve and variation of discharge current
with working pressure are
presented. The results showed the mixing of nitrogen gas with argon at ratio
Ar:N2 of 1:1, an increase in the discharge current was observed,
while at ratio Ar:N2 of 2.5:1 which increases the discharge current
at the distance of 7.5 cm. Paschen’s curves have been showed, it is clear that the breakdown
voltage VB increases as nitrogen gas percentage 50%. This effect is due to, the additional energy loss channel
nitrogen gas such as vibration, rotational and molecular dissociation. The
discharge current was varied by changing the working gas pressure. With
increasing of working gas pressure, which is attributed to more molecules which
are available for the electrons to collide with and to generate a new free
electron and a positive ion and so making the DC voltage more negative. The
discharge current is decreasing with increasing gas pressure above 3 mbar. The relation was plotted at certain discharge voltage of 600 V and three certain distances between the electrodes
of (2.5, 4.5 and 7.5 cm).
Cite this paper
Chiad, B. T. , Kadhim, F. J. and Anber, A. A. (2017). Study the Addition of Lab-Made Gas Mixing Unit with Varying of Inter-Electrode Distances on the Characterization of DC Magnetron Sputtering System. Open Access Library Journal, 4, e3269. doi: http://dx.doi.org/10.4236/oalib.1103269.
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