We prepared Cr2O3-Ta2O5 composite films using our RF magnetron co-sputtering method for the first time.
X-ray diffraction (XRD) patterns and photoluminescence (PL) spectra of the
films annealed at 700℃, 800℃, 900℃, and 1000℃ were evaluated. From their XRD
patterns, the Cr2O3- Ta2O5 film
annealed at 700℃ seemed to be
almost amorphous, and the one annealed at 800℃ seemed to be hexagonal Ta2O5 doped with Cr. In
addition, the Cr2O3-Ta2O5 films
annealed at 900℃ and 1000℃ seemed to include tetragonal CrTaO4 phases. Furthermore, it
seems that almost no defect exists in our Cr2O3-Ta2O5 composite films annealed at 700℃ - 1000℃ because their PL spectra have no
defect-related peak. We thus find that good-quality Cr2O3-Ta2O5 composite films including CrTaO4 can be obtained
using our very simple co-sputtering method and subsequent annealing above
900℃.
Cite this paper
Miura, K. , Osawa, T. , Yokota, Y. and Hanaizumi, O. (2015). Preparation of Cr2O3-Ta2O5 Composites Using RF Magnetron Sputtering. Open Access Library Journal, 2, e2094. doi: http://dx.doi.org/10.4236/oalib.1102094.
Cid,
M., Stem, N., Brunetti, C., Beloto, A.F. and Ramos, C.A.S. (1998) Improvements
in Anti-Reflection Coatings for High-Efficiency Silicon Solar Cells. Surface and Coatings Technology, 106,
117-120. http://dx.doi.org/10.1016/S0257-8972(98)00499-X
Hanaizumi, O., Miura, K., Saito, M., Sato, T.,
Kawakami, S., Kuramochi, E. and Oku, S. (2000) Frontiers Related with Automatic Shaping of Photonic
Crystals. IEICE Transactions on
Electronics, E83-C, 912-919.
Sato, T., Miura, K., Ishino, N., Ohtera, Y.,
Tamamura, T. and Kawakami, S. (2002) Photonic Crystals for the Visible Range Fabricated by
Autocloning Technique and Their Application. Optical and Quantum Electronics, 34, 63-70. http://dx.doi.org/10.1023/A:1013382711983
Singh,
M.K., Fusegi, G., Kano, K., Bange, J.P., Miura, K. and Hanaizumi, O. (2009)
Intense Photoluminescence from Erbium-Doped Tantalum Oxide Thin Films Deposited by Sputtering. IEICE
Electronics Express, 6,
1676-1682. http://dx.doi.org/10.1587/elex.6.1676
Bange, J.P.,
Singh, M.K., Kano, K., Miura, K. and Hanaizumi, O. (2011) Structural Analysis
of RF Sputtered Er Doped Ta2O5 Films. Key Engineering Materials, 459, 32-37. http://dx.doi.org/10.4028/www.scientific.net/KEM.459.32
Miura, K., Arai, Y., Osawa, T. and
Hanaizumi, O. (2012) Light-Emission Properties of Europium-Doped Tantalum- Oxide Thin Films Deposited by
Radio-Frequency Magnetron Sputtering. Journal of Light & Visual Environment,
36, 64-67. http://dx.doi.org/10.2150/jlve.36.64
Singh, M.K., Miura, K., Fusegi, G., Kano,
K. and Hanaizumi, O. (2013) Visible-Light Emission Properties of Erbium- Doped Tantalum-Oxide Films
Produced by Co-Sputtering. Key Engineering Materials, 534, 154-157. http://dx.doi.org/10.4028/www.scientific.net/KEM.534.154
Miura, K., Osawa, T., Yokota, Y., Suzuki,
T. and Hanaizumi, O. (2014) Fabrication of Tm-Doped Ta2O5 Thin Films Using a Co-Sputtering Method. Results in Physics, 4, 148-149. http://dx.doi.org/10.1016/j.rinp.2014.08.011
Miura, K., Osawa, T., Yokota, Y. and
Hanaizumi, O. (2014) Fabrication and Evaluation of Ta2O5:Y2O3 Co-Sputtered Thin Films. Results in Physics, 4, 185-186. http://dx.doi.org/10.1016/j.rinp.2014.09.004
Miura, K., Osawa, T., Suzuki, T., Yokota,
Y. and Hanaizumi, O. (2015) Yellow Light Emission from Ta2O5:Er,
Eu, Ce Thin Films Deposited Using a Simple Co-Sputtering Method. Results in
Physics, 5, 26-27. http://dx.doi.org/10.1016/j.rinp.2014.11.003
Miura, K., Osawa, T., Suzuki, T., Yokota,
Y. and Hanaizumi, O. (2015) Fabrication and Evaluation of Green-Light Emitting
Ta2O5:Er, Ce Co-Sputtered Thin Films. Results in Physics, 5, 78-79. http://dx.doi.org/10.1016/j.rinp.2015.02.002
Miura, K., Kano, K., Arai, Y. and
Hanaizumi, O. (2015) Preparation of Light-Emitting Ytterbium-Doped Tantalum- Oxide Thin Films Using a Simple
Co-Sputtering Method. Materials Sciences
and Applications, 6, 209-213. http://dx.doi.org/10.4236/msa.2015.62024
Miura, K., Arai, Y., Kano, K. and
Hanaizumi, O. (2015) Fabrication of Erbium and Ytterbium Co-Doped Tantalum- Oxide Thin Films Using
Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 343-347. http://dx.doi.org/10.4236/msa.2015.65039
Miura, K., Osawa, T., Yokota, Y., Suzuki,
T. and Hanaizumi, O. (2015) Photoluminescence Properties of Thulium and Cerium
Co-Doped Tantalum-Oxide Films Prepared by Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 263-268. http://dx.doi.org/10.4236/msa.2015.64031
Miura, K., Suzuki, T. and Hanaizumi, O.
(2015) Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide
Films Produced by Co-Sputtering. Materials
Sciences and Applications, 6, 656-660. http://dx.doi.org/10.4236/msa.2015.67067
Miura, K., Arai, Y. and Hanaizumi, O.
(2015) Observation of Blue-Light Emission Band from Eu-Doped Ta2O5 Thin Films Prepared Using Co-Sputtering. Materials
Sciences and Applications, 6, 676-680. http://dx.doi.org/10.4236/msa.2015.67069
Miura,
K., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of
Europium and Cerium Co-Doped Tantalum-Oxide Thin Films Prepared Using Co-Sputtering
Method. Journal of Materials Science and
Chemical Engineering, 3, 30-34. http://dx.doi.org/10.4236/msce.2015.38005
Miura, K., Osawa, T., Yokota, Y.,
Hossain, Z. and Hanaizumi, O. (2015) Preparation of CuO-Ta2O5 Composites Using a Simple Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 47-51. http://dx.doi.org/10.4236/msce.2015.39006
Korotcenkov,
G., Han, S.H. and Cho, B.K. (2013) Material Design for Metal Oxide Chemiresistive Gas
Sensors. Journal of Sensor Science and
Technology, 22, 1-17. http://dx.doi.org/10.5369/JSST.2013.22.1.1
Yamaga,
M., Henderson, B., O’Donnell, K.P., Trager Cowan, C. and Marshall, A. (1990) Temperature Dependence of the Lifetime of Cr3 Luminescence in Garnet Crystals I. Applied
Physic B, 50, 425-431. http://dx.doi.org/10.1007/BF00325096
Yamaga,
M., Henderson, B., O’Donnell, K.P. and Yue, G. (1990) Temperature Dependence of the Lifetime of Cr3 Luminescence in Garnet Crystals II. The Case of YGG. Applied Physic B, 51, 132-136.
Schlottig, F.,
Schreckenbach, J. and Marx, G. (1999) Preparation and Characterisation of Chromium and Sodium
Tantalate Layers by Anodic Spark Deposition. Fresenius’ Journal of Analytical Chemistry, 363, 209-211. http://dx.doi.org/10.1007/s002160051174