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Applied Physics 2022
氮化硅脊波导在弯曲条件下折射率变化特性
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Abstract:
本文采用有限–差分方法模拟了绝缘体上氮化硅(Si3N4)脊型弯曲波导的折射率特性。基于弯曲波导的麦克斯韦方程，本文对弯曲波导芯层内折射率随波导半径与结构的变化进行了分析。进而，利用有限–差分算法的软件MODE Solutions的仿真结果表明，在脊型波导结构下，弯曲的波导结构随着弯曲半径的增加导致传输光中心发生偏移，造成TE/TM模式的有效折射率发生变化。该研究对于各波导器件中脊型波导弯曲设计评估具有重要意义。
In this paper, the refractive index characteristics of silicon nitride (Si3N4) bent rib waveguide on Silicon-on-Insulator are simulated by finite-difference method. Based on the Maxwell’s equations of bent waveguides, the refractive index changes of the core with the radius and structure of a bent waveguide are analyzed. Then, our simulation results from the MODE Solutions of the Finite-Difference software show that, for a bent rib waveguide structure, the center of transmitted light shifts with the increase of bending radius, and the effective refractive index of TE/TM mode changes with the increase of bending radius. This research is of great significance for the design and evaluation of various bending rib waveguide devices.
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