%0 Journal Article
%T 氮化硅脊波导在弯曲条件下折射率变化特性<br>Refractive Index Variation Characteristics of Silicon Nitride Rib Waveguide under Bending Condition
%A 朱玉麟
%A 孙德贵
%A 徐亚萌
%J Applied Physics
%P 68-74
%@ 2160-7575
%D 2022
%I Hans Publishing
%R 10.12677/APP.2022.122009
%X 本文采用有限–差分方法模拟了绝缘体上氮化硅(Si<sub>3</sub>N<sub>4</sub>)脊型弯曲波导的折射率特性。基于弯曲波导的麦克斯韦方程，本文对弯曲波导芯层内折射率随波导半径与结构的变化进行了分析。进而，利用有限–差分算法的软件MODE Solutions的仿真结果表明，在脊型波导结构下，弯曲的波导结构随着弯曲半径的增加导致传输光中心发生偏移，造成TE/TM模式的有效折射率发生变化。该研究对于各波导器件中脊型波导弯曲设计评估具有重要意义。<br />
In this paper, the refractive index characteristics of silicon nitride (Si<sub>3</sub>N<sub>4</sub>) bent rib waveguide on Silicon-on-Insulator are simulated by finite-difference method. Based on the Maxwell’s equations of bent waveguides, the refractive index changes of the core with the radius and structure of a bent waveguide are analyzed. Then, our simulation results from the MODE Solutions of the Finite-Difference software show that, for a bent rib waveguide structure, the center of transmitted light shifts with the increase of bending radius, and the effective refractive index of TE/TM mode changes with the increase of bending radius. This research is of great significance for the design and evaluation of various bending rib waveguide devices.
%K 氮化硅，脊波导，弯曲波导，有效折射率<br>Silicon Nitride
%K Rib Waveguide
%K Curved Waveguide
%K Effective Refractive Index
%U http://www.hanspub.org/journal/PaperInformation.aspx?PaperID=48856