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-  2018 

电子束用聚焦静电透镜的优化设计 Optimal design of electrostatic focusing lens for electron beam

Keywords: 静电透镜,电子束,轴对称静电场,粒子模拟软件

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Abstract:

在分析静电透镜电子光学理论的基础上,提出电场优化计算的目标函数,借助ANSYS软件确定了透镜电极中心点电位、优化设计透镜极的尺寸;同时利用Magic粒子模拟软件得到电子束包络线,聚焦效果满足设计指标.实验结果表明,随着外加电压逐步增加,收集极上的光斑向中心汇聚,亮度增强,电压过高时出现光斑发散.电压为60kV时,具有理想的聚焦效果,束斑直径在10mm左右,达到了设计要求

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