全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...
-  2015 

碳含量对TiCN涂层的结构和力学性能的影响 Structure and Mechanical Properties of Carbon Content on the TiCN Coating Effect

Keywords: 多弧离子镀,TiCN,显微硬度,结合力

Full-Text   Cite this paper   Add to My Lib

Abstract:

采用多弧离子镀技术,以N2为氮源,C2H2为碳源,Ti为靶源,在单晶硅和硬质合金衬底上沉积Ti CN硬质涂层,系统地研究制备工艺对Ti CN涂层的结构、形貌、硬度及摩擦学性能的影响.用X射线衍射、原子力显微镜和扫描电子显微镜测量了涂层的形貌和晶体结构;用HX-1000显微硬度计和HH-3000划痕仪测量了涂层的硬度和结合强度.研究结果表明:Ti CN和Ti N涂层同为单相的Na Cl型面心立方结构;在优化条件下制备的Ti CN涂层的最高硬度为38.5 GPa,远高于Ti N涂层的27.9 GPa硬度;Ti CN涂层与硬质合金的膜基结合力超过70 N

References

[1]  Berg G,Friedrich C,Broszeit E,et al.Development of chromium nitride coatings substituting titanium nitride[J].Surf Coat Technol,1996,86-87:184-191.
[2]  Sundgren J E,Hentzell T G.Areview of the present state of art in hard coatings[J].Vac Sci Technol,1986,4(5):2259-2279.
[3]  Der flinger V H,Schutze A,Ante M.Mechanical and structural properties of various alloyed Ti Al N-based hard coatings[J].Surf Coat Technol,2006,200(16-17):4693-4700.
[4]  唐达培,高庆,江晓禹,等.氮碳化钛涂层的性能和结合强度[J].表面技术,2004,33(4):13-16.Tang D P,Gao Q,Jiang X Y,et al.Structural properties and adhesion of Ti CN multilayer films[J].Surf Eng,2004,33(4):13-16(Ch).
[5]  高见,李建平,马文存,等.WC基硬质合金CVD涂层的组织与性能[J].中国有色金属学报,2002,12(2):331-333.Gao J,Li J P,Ma W C,et al.Structural properties of CVD coatings[J].Chin J Nonferrous Metals,2002,12(2):331-333(Ch).
[6]  Yang Z T,Yang B,Guo L P,et al.Synthesis of Ti-Si-N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering[J].Appl Surf Sci,2009,255:4720-4724.
[7]  Guo C,Lee D,Chen P,et al.Deposition of Ti Si N coatings by arc ion plating process[J].Applied Surface Science,2008,254(10):3130-3136.
[8]  Jin G,Xu B S,Wang H D,et al.Investigation on the formation and wear resistance of Ti C coatings[J].Mater Sci Eng,2006,436(5):335-359.
[9]  Wang L,Dong S R,You J F,et al.Microstructure and microhardness of Ti(C,N)and Ti N/Ti(C,N)multilayer films[J].Trans Mater Heat Treatment,2010,31(2):113-118.
[10]  Fu Y Q,Loh N L,Batchelor A W,et al.Preparation and fretting wear behavior of ion-beam-enhanced-deposition Cr N films[J].Mater Sci Eng A,1999,265(1/2):224-232.

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133