Sundgren J E,Hentzell T G.Areview of the present state of art in hard coatings[J].Vac Sci Technol,1986,4(5):2259-2279.
[3]
Der flinger V H,Schutze A,Ante M.Mechanical and structural properties of various alloyed Ti Al N-based hard coatings[J].Surf Coat Technol,2006,200(16-17):4693-4700.
[4]
唐达培,高庆,江晓禹,等.氮碳化钛涂层的性能和结合强度[J].表面技术,2004,33(4):13-16.Tang D P,Gao Q,Jiang X Y,et al.Structural properties and adhesion of Ti CN multilayer films[J].Surf Eng,2004,33(4):13-16(Ch).
[5]
高见,李建平,马文存,等.WC基硬质合金CVD涂层的组织与性能[J].中国有色金属学报,2002,12(2):331-333.Gao J,Li J P,Ma W C,et al.Structural properties of CVD coatings[J].Chin J Nonferrous Metals,2002,12(2):331-333(Ch).
[6]
Yang Z T,Yang B,Guo L P,et al.Synthesis of Ti-Si-N nanocomposite coatings by a novel cathodic arc assisted middle-frequency magnetron sputtering[J].Appl Surf Sci,2009,255:4720-4724.
[7]
Guo C,Lee D,Chen P,et al.Deposition of Ti Si N coatings by arc ion plating process[J].Applied Surface Science,2008,254(10):3130-3136.
[8]
Jin G,Xu B S,Wang H D,et al.Investigation on the formation and wear resistance of Ti C coatings[J].Mater Sci Eng,2006,436(5):335-359.
[9]
Wang L,Dong S R,You J F,et al.Microstructure and microhardness of Ti(C,N)and Ti N/Ti(C,N)multilayer films[J].Trans Mater Heat Treatment,2010,31(2):113-118.
[10]
Fu Y Q,Loh N L,Batchelor A W,et al.Preparation and fretting wear behavior of ion-beam-enhanced-deposition Cr N films[J].Mater Sci Eng A,1999,265(1/2):224-232.