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A Sputtering Deposition of Al Enhances the Output Reproducibility in a Conducting Rubber Force Sensor

DOI: 10.4236/jst.2016.63004, PP. 46-55

Keywords: Conducting Rubber, Force Sensor, Electrode, Magnetron Sputtering, Reproducibility

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Abstract:

Compressive force sensors or pressure sensors are indispensable to tactile sensors in humanoid robots. It is investigated that low-cost electro-conducting rubber sheets are applied to the force sensor, of which the biggest problem is its poor reproducibility. It was found that the aluminum deposition by a vacuum evaporation method shows excellent characteristics but suffers deterioration by a radiation heating effect. The aluminum electrode was deposited by a sputtering method, known to have an advantage of a low-temperature method, and the reproducibility of the output was improved.

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