%0 Journal Article
%T A Sputtering Deposition of Al Enhances the Output Reproducibility in a Conducting Rubber Force Sensor
%A Masato Ohmukai
%A Yasushi Kami
%J Journal of Sensor Technology
%P 46-55
%@ 2161-1238
%D 2016
%I Scientific Research Publishing
%R 10.4236/jst.2016.63004
%X Compressive force sensors or pressure sensors are indispensable to tactile sensors in
humanoid robots. It is investigated that low-cost electro-conducting rubber sheets
are applied to the force sensor, of which the biggest problem is its poor reproducibility.
It was found that the aluminum deposition by a vacuum evaporation method
shows excellent characteristics but suffers deterioration by a radiation heating effect.
The aluminum electrode was deposited by a sputtering method, known to have an
advantage of a low-temperature method, and the reproducibility of the output was
improved.
%K Conducting Rubber
%K Force Sensor
%K Electrode
%K Magnetron Sputtering
%K Reproducibility
%U http://www.scirp.org/journal/PaperInformation.aspx?PaperID=69873