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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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tib_2超硬薄膜的合成及性能
Keywords: 离子束,薄膜,tib_2
Abstract:
？采用离子束溅射方法制备了tib2硬质薄膜afm观察表明薄膜表面非常光滑aes、xrd和xps分析证明薄膜中上要是b、ti比为1.8,六方结构的tib2多品体,且呈现强烈的(101)择优取向.由超显微压痕测量系统测得的加载、卸载曲线计算得到的薄膜的防微硬度高达48gpa。
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