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OALib Journal期刊
ISSN: 2333-9721
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磁控溅射制备sic薄膜的高温热稳定性
Keywords: 无机非金属材料,磁控溅射,热稳定性,高温退火,sic薄膜
Abstract:
？采用磁控溅射方法在si基底上制备sic薄膜,研究了sic薄膜经不同温度和气氛条件高温退火前后结构、成份的变化.结果表明,薄膜主要以非晶为主,由si--c键,c--c键和少量si的氧化物杂质组成;在真空条件下经高温退火后,薄膜c--c键的含量减少,而si--c键的含量增加,真空退火有利于sic的形成;在800℃空气中退火后,薄膜表面生成一层致密的sio2薄层,阻止了氧气与薄膜内部深层的接触,有效保护了内部的sic.在空气条件下,sic薄膜在800℃具有较好的热稳定性.
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