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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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真空感应熔炼和定向凝固制备多晶硅中铝的除杂
Keywords: 无机非金属材料,？多晶硅,？真空感应熔炼,？定向凝固,铝
Abstract:
？用真空感应熔炼和定向凝固法制备多晶硅,通过成分测定和理论计算研究了铝杂质的除杂机理。结果表明,在真空熔炼保温阶段(t？≥1723k),硅中的铝杂质明显蒸发;在随后的定向凝固过程中,铝杂质的分凝偏析是主要的,但仍有部分铝蒸发。建立了一个包括铝分凝和蒸发机制的新模型,模拟铝在硅中的分布曲线。模拟结果与铝在硅中的实际分布符合得很好。
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