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OALib Journal期刊
ISSN: 2333-9721
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薄膜生长的三维蒙特卡罗模型
Keywords: 材料科学基础学科,薄膜生长,三维montecarlo模型,生长方式,形貌
Abstract:
？构造三维蒙特卡罗模型,研究了六边形基底薄膜生长的过程.在模型中针对每个原子考虑了原子沉积、原子扩散及原子脱附三个动力学过程,并认为这三个过程是相互独立的,即在同一计算步长中三个过程依据各自的概率发生.经过生长过程可视化的结果表明,薄膜原子之间的相互作用能、基底温度和沉积速率对薄膜的生长方式有显著的影响.这一结论得到了实验的验证.
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