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OALib Journal期刊
ISSN: 2333-9721
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硝磷酸腐蚀对cdte薄膜性能及背接触层的影响
Abstract:
？采用硝磷酸(np)背表面刻蚀工艺并结合真空共蒸发法分别沉积了几种背接触层材料,研究了np腐蚀对cdte薄膜性能及背接触层的影响.结果表明:np腐蚀后在cdte薄膜上产生了富碲层;退火后,碲容易与背接触材料中的铜反应生成cuxte.通过严格控制和优化腐蚀工艺,选择znte/znte:cu作为背接触层材料,可制备出优异性能的cdte太阳电池.
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