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OALib Journal期刊
ISSN: 2333-9721
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织构对cvd自支撑金刚石薄膜残余应变的影响
Abstract:
？计算了薄膜试样不同方向的弹性模量,研究了织构和甲烷浓度对cvd自支撑金刚石薄膜的宏观残余应变的影响.结果表明,织构使cvd金刚石薄膜的弹性模量和宏观残余应变呈现各向异性.甲烷浓度的升高导致织构组分密度水平变化,使薄膜的弹性模量增大,从而降低残余应变;另一方面,杂质浓度的升高增大宏观残余应变.改变薄膜沉积工艺参数可调整织构,从而调节薄膜的残余应力.
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