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OALib Journal期刊
ISSN: 2333-9721
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原子层淀积al2o3薄膜表面自组装au纳米颗粒及其热稳定性
Keywords: 金属材料,化学自组装生长,au纳米颗粒,热稳定性
Abstract:
？在原子层淀积的al2o3薄膜表面自组装生长au纳米颗粒，研究了au纳米颗粒的自组装过程和热稳定性.结果表明，原子层淀积的al2o3薄膜表面很容易吸附氨丙基三甲基硅烷(aptms),有利于au纳米颗粒的自组装,生长出的au纳米颗粒尺寸为5--8nm,密度约为4×1011cm-2.在300℃氮气中退火使au纳米颗粒的尺寸增大,但是没有改变aptms的吸附状态和au的化学组成.当退火温度提高到450℃时,au纳米颗粒发生明显的团聚,且分布变得极不均匀.
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