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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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锆钛酸铅(pzt)薄膜的自发极化与压电响应
Keywords: 压电薄膜,溶胶--凝胶,mems
Abstract:
？用溶胶--凝胶法在pt/ti/sio$_{2}$/si(100)基片上制备了近等原子比的压电pzt薄膜.在准同型相界附近的pzt薄膜的应变机制是受极化控制的压电效应,内电场导致薄膜的自发极化定向,使薄膜未经极化就具有明显的压电响应.
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