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OALib Journal期刊
ISSN: 2333-9721
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快速热退火对多层ge量子点晶体质量的影响
Keywords: 无机非金属材料,快速热退火,ge量子点,双晶x射线衍射,拉曼光谱
Abstract:
？使用超高真空化学气相淀积(uhv/cvd)设备在si衬底上生长多层ge量子点,用双晶x射线衍射(dcxrd)、拉曼光谱(raman)等手段表征在不同条件下快速热退火的ge量子点材料的组分、应力等特性,研究了快速热退火对多层ge量子点晶体质量的影响。结果表明:随着退火温度的升高,量子点中ge的组分下降,量子点应变的弛豫程度加剧。在1000℃退火20s后,量子点材料已经完全弛豫。
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