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OALib Journal期刊
ISSN: 2333-9721
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pecvd法制备类金刚石薄膜的摩擦学性能
Keywords: 材料表面与界面,等离子增强化学气相沉积,类金刚石膜,xps,摩擦磨损
Abstract:
？采用射频等离子体增强化学气相沉积法(rf--pecvd),在45钢表面沉积了类金刚石(dlc)薄膜,借助激光拉曼光谱仪(raman)、x射线光电子能谱(xps)、扫描电子显微镜(sem)和原子力显微镜(afm),分析了dlc膜的键结构、表面形貌和结构特征,用原位纳米力学测试系统测定了薄膜的硬度。以gcr15钢为摩擦副材料,用umt--ⅱ摩擦磨损实验机考察了不同载荷和滑行速度条件下dlc膜的摩擦磨损性能,并分析了磨损机理。结果表明,在45钢表面沉积的薄膜具有典型的类金刚石薄膜的结构特征,薄膜表面由致密的纳米级颗粒组成,具有较高的硬度。在各种摩擦磨损实验条件下dlc薄膜表现出良好的抗磨损性能,摩擦系数均明显比45钢的低,尤其在高速低载下摩擦系数低至0.008。
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