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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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氧化锌透明导电薄膜的制备及其特性
Keywords: 氧化锌薄膜,透明导电薄膜,溅射
Abstract:
？氧化锌薄膜的透明导电特性与化学计量偏离和溅射条件有关.以2%(质量分数)氧化铝掺杂的氧化锌陶瓷作靶,采用rf磁控溅射技术制备的透明导电薄膜,其电阻率4.5×10-3ωcm,载流子浓度2.8×1020cm-3,霍尔迁移率15.8cm2/v.s,平均透射率(400-800nm)大于80%.
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