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OALib Journal期刊
ISSN: 2333-9721
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用电共沉积方法制备ingaas薄膜
Keywords: ingaas薄膜,电共沉积
Abstract:
？用电共沉积方法制备出4种ingaas薄膜,用能谱析仪分析了薄膜成分,用分光光度计和单色仪测量薄膜的透射率.结果表明,inxga1-xas薄膜为多晶结构,晶粒尺寸约为0.25μm,晶粒细致、均匀,其v-i特性是线性的,随着ga含量的减少,发光波长增大.ingaas薄膜的发射光波长为1.3~1.5μm.
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