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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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热场分布对大直径czsi单晶中氧含量的影响
Keywords: czsi,氧含量,热场分布,热对流,数值模拟
Abstract:
？为了降低大直径czsi单晶生长过程中氧的引入,采用不同的热场,通过最优化方法,得到了适于大直径(154mm)晶体生长的热场温度分布,使熔体的纵向温度梯度下降,热对流减小,硅单晶中氧含量降低.
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