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OALib Journal期刊
ISSN: 2333-9721
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高功率脉冲磁控溅射zrn纳米薄膜制备及性能研究
Keywords: 材料表面与界面,高功率脉冲磁控溅射,？氮化镐,？微观结构,？表面性能
Abstract:
？采用高功率复合脉冲磁控溅射的方法(hppms)在不锈钢基体上制备zrn纳米薄膜,并研究了不同的工作气压对薄膜形貌、相结构及各种性能的影响。采用sem、xrd对其表面形貌和结构进行分析,发现制备的薄膜表面光滑、致密,无大颗粒,主要以zrn(111)和zrn(220)晶面择优生长,并呈现出多晶面竞相生长的现象。对薄膜硬度、弹性模量、耐磨性和耐腐蚀性的测试发现薄膜具有很高的硬度,最高可达33.1gpa,同时摩擦系数均小于0.2,耐腐蚀性也都有很大提高,腐蚀电位比基体提高了0.28v,腐蚀电流下降到未处理工件的1/5。工作气压较低时,薄膜耐磨耐蚀性能都较好,但在较高气压时,耐磨耐蚀性能出现一定的下降。
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