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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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非化学计量比sbox薄膜的结晶动力学研究
Keywords: 无机非金属材料,sbox薄膜,反应溅射,xrd,dsc
Abstract:
？利用直流磁控反应溅射法在不同氧分压下制备了sbox薄膜，对退火前后薄膜的x射线衍射(xrd)分析表明，退火后薄膜结构发生了从非晶态向晶态的转变。利用示差扫描量热法(dsc)测出不同升温速度条件下非晶态薄膜粉末的晶化峰温度，用kissinger公式计算了材料的结晶活化能。计算结果表明，随着溅射时氧分压的增加，薄膜的结晶活化能增加，而相应的非晶态与晶态之间的焓差则呈现出相反的变化趋势。
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