王广海,李国新,阿苏娜. 薄膜桥火工品的制备与性能研究[J]. 含能材料,2008,16(5): 543-546. WANG Guang-hai,LI Guo-xin,A Su-na. Preparation and properties of thin film bridge EED[J]. Chinese Journal of Energetic Materials(Hanneng Cailiao),2008,16(5): 543-546.
[2]
Brattl G E. Electrc igniter with conductive bodies and thin connector: US4335653[P],1982.
[3]
Toshiyuki T. Mechanical reliability evatuation and its standardization of thin films used in MEMS[D]. Kyoto: Kyoto University,2004.
[4]
Zhang K L,Chou S K,Ang S S. Fabrication,modeling and testing of a thin film Au/Ti microheat international[J]. Journal of Thermal Sciences,2007(46): 580-588.
[5]
Hélène P,Carole R Marjorie Sanchez,Marjorie Sanchez,et al. Integration of a MEMS base safe arm and fire device[J]. Sensors and Actuators,2010(159): 157-167.
[6]
Larangot B,Rossi C,Camps T,et al. Solid propellant microrockets towards a new type of power MEMS[C]∥Nanotech AIAA 2002-5758,Houston,September 9-12,2002.
[7]
Lee J K,Lee D H,Kwon S. Design and performance evaluation of components of micro solid propellant thruster[C]∥40th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit,Fort Lauderdale,Florida,July 11-14,2004.
Window B,Savvides N. Charged particle fluxes from planar magnetrons sputtering sources[J]. J Vac Sci Technol,1986,4(2A): 196-202.
[10]
韩志伟. 复合爆炸桥箔研究[D]. 西安: 中国兵器工业第213所,2010. HAN Zhi-wei. Study on the clad exploding foil[D]. Xi′an: 213th Research Institute of China Ordnance Industry,2010.
[11]
许超,李兆泽,万红,等. MEMS固体微推进器中Cr薄膜点火电阻的研究[J]. 传感器技术学报,2006,19(5): 1411-1418. XU Chao,LI Zhao-ze,WAN Hong,et al. Research on the Cr membrane igniting resistance in MEMS solid propellant micro-thruster[J]. Chinese Journal of Sensors and Actuators,2006,19(5): 1411-1418.
[12]
David H Lewish Jr,Siegfried W Janson,Ronald B Cohen,et al. Digital micropropulsion[J]. Sensors and Actuators,2000(80): 143-154.