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含能材料  2011 

Ni-Cr桥膜换能元的制备

DOI: 10.3969/j.issn.1006-9941.2011.05.023

Keywords: 物理化学,火工品,Ni-Cr薄膜,溅射,刻蚀,换能元,发火电压

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Abstract:

为了制作出阻值一致性好,发火电压低的金属桥膜换能元,对Ni-Cr薄膜换能元制作过程中的薄膜溅射、刻蚀等工艺进行了探索,并对制作的换能元参数进行了测试。结果显示随着溅射功率的减小,薄膜的沉积速率减小,成膜致密性提高;在一定范围内,刻蚀液中高氯酸所占的比例越大,刻蚀用时越短。制作的Ni-Cr薄膜换能元电阻的一致性较好,在47μF电容情况下发火电压均值为6.67V。

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