全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...

256×256Si微透镜阵列与红外焦平面阵列单片集成研究

Keywords: PtSi红外焦平面阵列微透镜阵列单片集成技术标量衍射信噪比

Full-Text   Cite this paper   Add to My Lib

Abstract:

基于标量衍射理论设计了8位相菲涅尔衍射微透镜阵列.利用多次曝光和离子束刻蚀技术在大规模面阵(256×256)PtSi红外焦平面阵列的背面制作了单片集成微透镜阵列样品(单元面积为30μm×40μm).测试结果表明,单片集成微透镜的红外焦平面阵列样品的信噪比提高了2.0倍.

References

[1]  Yi X J, Zhang X Y, Li Y, et al. Microlens arrays formed by melting photoresist and ion beam milling. In: Proc. SPIE,1997,3267: 249-253
[2]  Parn M W, Goodman J W. Effect of VLSI fabraiction errors on Kino-form efficiency. In:Proc.SPIE,1990,1211: 125-136
[3]  Perstl M, Kuhlow B, Pawlowski E. Blazed Fresnel zones approximated by discrete step profiles: effects of fabrication errors. In:Proc.SPIE,1993,1732:89-99
[4]  Gordon N T, Jones C L, Purdy D J. Application of microlenses to infrared detector arrays.Infrared Phys.,1991,31(3): 599-604
[5]  Motamedi M Edward, T Ennant William E, et al.Micro-optic integration with focal plane arrays.Optical Engineering,1997,36(5): 1374-1381
[6]  D\'Amato Dante, Centamore Robert. Two applications for microlens arrays: detector fill factor improvement and laser diode collimation.In:Proc.SPIE,1991,1544: 166-177
[7]  CHEN Si-Hai, YI Xin-Jian, HE Miao, et al. Research on hybrid device of Si microlens arrays with long focus and IR detector arrays. Digest, 25thInternational Conference on Infrared and Millimeter Waves,2000:147-148
[8]  CHEN Si-Hai, YI Xin-Jian, LI Yi, et al. Design of diffractive microlens arrays integration with focal plane arrays. In:Proc. SPIE,2000,4224: 170-173
[9]  Swanson G J. Binary optics technology: the theory and design of multi-level diffractive optical elements.Technical Report 854, Lincoln Laboratory, MIT. 14 Aug.1989

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133