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PbZr0.52Ti0.48O3薄膜红外椭圆偏振光谱研究

Keywords: PbZr0.52Ti0.48O3薄膜红外椭圆偏振光谱光学常数静态电荷铁电薄膜锆钛酸铅

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Abstract:

用磁控溅射法在Pt/Ti/SiO2/Si衬底上制备了PbZr0.52Ti0.48O3(PZT)薄膜.XRD结果表明经过退火后的PZT薄膜呈现多晶结构.通过红外椭圆偏振光谱仪测量了λ为2.5~12.6μm范围内PZT薄膜的椭偏光谱,采用经典色散模型拟合获得PZT薄膜的红外光学常数,同时拟合得到未经处理的PZT薄膜和退火后PZT薄膜的厚度分别为454.2nm和450.3nm.最后通过拟合计算得到结晶PZT薄膜的静态电荷值为|q|=1.769±0.024.这说明在磁控溅射法制备的PZT薄膜中,电荷的转移是不完全的.

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