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砷掺HgCdTe长波红外光电二极管阵列的制备与性能

Keywords: As掺HgCdTe,长波HgCdTe红外光电二极管阵列,伏安特性,表面处理工艺

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Abstract:

采用砷(As)掺杂HgCdTe材料研制了响应截止波长为12.5μm,规格为256×1的长波红外光电二极管阵列.实验设计了一种新的pn结测量方法,测量发现砷掺长波HgCdTe材料离子注入形成pn结深度在3.6~5.3μm之间,而其最大横向尺寸大约是设计尺寸的1.3倍.实验采用一种改进的表面处理工艺制备了砷掺HgCdTe长波红外光电二极管阵列,获得了良好的电学性能,该工艺与常规表面处理工艺相比可以使器件峰值阻抗提高2个量级,而-0.5v偏压下的动态电阻可提高约30倍.研究认为,器件性能提高的原因是由于改进工艺可以有效抑制器件表面漏电流.

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