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碲镉汞p^+-on-n长波异质结探测器的研究

Keywords: 异质结焦平面器件碲镉汞MBE暗电流器件性能湿法腐蚀长波结焦工艺

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Abstract:

报道了HgCdTep^-on-o长波异质结焦平面器件的研究结果.采用由分子柬外延(MBE)和原位掺杂技术生长的P^-on-n异质结材料,通过湿法腐蚀、台面钝化、台面金属化、铟柱制备和互连等工艺,得到了HgCdTep^-on-o长波异质结焦平面器件.根据,I-V实验结果和暗电流理论,拟合计算和分析了各种暗电流机制对器件性能的影响.且获得了器件的响应光谱和探测率。

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