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磁控溅射法制备的PZT非晶薄膜光学性质研究

Keywords: 磁控溅射法PZT非晶薄膜禁带宽度折射率透射率消光系数

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Abstract:

采用磁控溅射方法在石英玻璃上制备了PbZrxTi1-xO3(PZT)(x=0.52)非晶薄膜,并测量了200~1100nm的紫外.可见.近红外透射光谱.基于薄膜的结构和多层结构的透射关系,发展了仅有6个拟合参数的光学常数计算模型.利用该模型,可以同时获得薄膜在宽波段范围内的光学常数和厚度,得到折射率的最大值为2.68,消光系数的最大值为0.562,拟合薄膜厚度为318.1nm.根据Tauc′s法则,得到PZT非晶薄膜的直接禁带宽度为3.75eV.最后,利用单电子振荡模型成功地解释了薄膜的折射率色散关系.

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