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128元非致冷氧化钒红外探测器的制作

Keywords: 红外探测器微桥结构微桥阵列氧化钒薄膜电阻温度系数

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Abstract:

采用新工艺在氮化硅衬底上制备了室温时电阻温度系数为-0.021K-1的氧化钒薄膜,以此为基础,利用光刻和反应离子刻蚀工艺在硅衬底上制作了128元氧化钒红外探测器.为了降低探测器敏感元与衬底间的热导,设计制作了自支撑的微桥结构阵列.测试结果显示探测器的响应率和探测率在8~12μm的长波红外波段处分别达到104V/W和2×108cmHz1/2W-1.

References

[1]  Baltes H, Paul O, Brand O. Micromachined thermally based CMOS microsensors[J]. Proc IEEE, 1998, 86(8):1660-1678
[2]  Horn S, Lohrmann D, Campbell J, et al. Uncooled IR technology and application[J]. SPIE, 2001, 4639: 210-221
[3]  Kinch M A. Fundamental physics of infrared detector materials[J]. J Electron Mater, 2000, 29:809-817
[4]  Brady J, Schimert T, Gooch D, et al. Advances in amorphous silicon uncooled IR systems [J]. Proc SPIE Int Soc Opt Eng, 1999, 3698:191-197
[5]  Almasri M, Butler D P, Celik B Z. Free standing amorphous Y-Ba-Cu-O detectors for uncooled IR detection and the effects of doping[J]. Proc SPIE int Soc Opt Eng, 1999,3794: 66-75
[6]  CHEN Chang-Hong, YI XIN-Jian, ZHAO Xing-Yong, et al. Preparation and properties of vanadium dioxide thin film for uncooled microbolometer[ C ]. Beijing: 25th International Conference on Infrared and Millimeter Waves, 2000: 211-212
[7]  CHEN Chang-Hong, YI Xin-Jian, ZHANG Jing, et al. Micromachined uncooled IR bolometer linear array using VO2 thin films[J]. Int J Infiared Millim Waves, 2001, 22( 1 ):53-57
[8]  CHEN Chang-Hong, YI Xin-Jian, ZHANG Jing, et al.Characterization of uncooled VO2-based thin films bolometer[J].J.Infrared Millim. Waves(陈长虹,易新建,张静,等.基于VO2薄膜非致冷红外探测器性能研究.红外与毫米波学报),2001,20(4):136-138

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