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材料工程  2011 

水平震荡机械研磨对酸性镀铜微观结构的影响

Keywords: 机械研磨,电沉积,铜镀层,水平震荡,结构,耐蚀性

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Abstract:

在传统酸性镀铜液中加入玻璃球,玻璃球以不同频率在试样表面滚动-滑动形成机械研磨(MA)。利用SEM,XRD和AutoLab考察震荡频率对机械研磨增强镀层(MAEE)的微观结构、晶粒尺寸、沉积速率、孔隙率和在3.5%NaCl(质量分数)溶液中耐蚀性的影响。结果表明,与传统镀层(TEP)相比,水平震荡MA可显著减小TEP镀层的晶粒尺寸和孔隙率,显著提高TEP镀层的耐蚀性。在1.0~4.0Hz范围内,改变频率对MAEE镀层晶粒细化的影响不明显,当震荡频率为2.0Hz和3.0Hz时,由于MA的不均匀性,使MAEE镀层的性能下降,但仍明显优于TCP镀层。讨论了水平震荡频率对MAEE微观结构的影响机理。

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