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材料工程  2011 

冷坩埚原理及其在多晶硅制备中的应用

, PP. 90-96

Keywords: 冷坩埚,电磁感应,多晶硅,提纯

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Abstract:

综述了冷坩埚技术的原理、特点与技术要求,重点介绍了电磁冷坩埚技术的工艺性能与影响因素,总结了各因素对冷坩埚性能的影响规律,最后概述了冷坩埚技术在多晶硅提纯与成型制备中的优势和应用,并展望了其未来的发展。

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