全部 标题 作者
关键词 摘要

OALib Journal期刊
ISSN: 2333-9721
费用:99美元

查看量下载量

相关文章

更多...
材料工程  2012 

沉积时间对ZrTiN涂层微观结构及性能的影响

, PP. 30-34

Keywords: ZrTiN涂层,多弧离子镀,沉积时间,微观结构,性能

Full-Text   Cite this paper   Add to My Lib

Abstract:

采用多弧离子镀膜法,在YT15及YG8硬质合金基体上沉积ZrTiN硬质涂层,并分析涂层微观形貌、物相组成、涂层的厚度、硬度及结合力等性能参数随沉积时间的变化。结果表明沉积时间不会影响ZrTiN涂层的晶面指数,涂层中只有单一面心立方结构相形成,且晶面指数始终为(111);涂层的晶粒尺寸约为10nm且随沉积时间变化不大。沉积时间为120min时,涂层的显微硬度和结合力明显下降。

References

[1]  KLOCKE F, KRIEG F T. Coated tools for metal cutting-features and applications[J].CIRP Annals-Manufacturing Technology, 1999,48(2): 515-525.
[2]  艾兴. 高速切削加工技术 [M].北京:国防工业出版社,2004.108-109.
[3]  DENG J X, LIU J H, DING Z L, et al. Unlubricated friction and wear behaviors of ZrN coatings against hardened steel[J].Materials & Design, 2008,29(9): 1828-1834.
[4]  KANG M C, JE S K, KIM K H, et al. Cutting performance of CrN-based coatings tool deposited by hybrid coating method for micro drilling applications[J].Surface and Coatings Technology, 2008,202(22-23): 5629-5632.
[5]  SCHULZ H, DRR J, RASS I J, et al. Performance of oxide PVD-coatings in dry cutting operations[J].Surface and Coatings Technology, 2001,146-147: 480-485.
[6]  ANTUNES R A, RODAS A C D, LIMA N B, et al. Study of the corrosion resistance and in vitro biocompatibility of PVD TiCN-coated AISI 316L austenitic stainless steel for orthopedic applications[J].Surface and Coatings Technology, 2010,205(7): 2074-2081.
[7]  LEE J K, YANG G S. Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering[J].Transactions of Nonferrous Metals Society of China, 2009,19(4): 795-799.
[8]  LEONI M, SCARDI P, ROSSI S, et al. (Ti,Cr)N and Ti/TiN PVD coatings on 304 stainless steel substrates: texture and residual stress[J].Thin Solid Films, 1999,345(2): 263-269.
[9]  刘建华,邓建新,张庆余. TiAlN涂层刀具的发展与应用[J].工具技术, 2006, 40(4):9-13.
[10]  PANJAN P, NAVINSEK B, CVELBAR A, et al. Oxidation of TiN, ZrN, TiZrN, CrN, TiCrN and TiN/CrN multilayer hard coatings reactively sputtered at low temperature[J].Thin Solid Films, 1996,281-282(1-2): 298-301.
[11]  DONOHUE L A, CAWLEY J, BROOKS J S. Deposition and characterisation of arc-bond sputter TixZryN coatings from pure metallic and segmented targets[J].Surface and Coatings Technology, 1995,72(1-2): 128-138.
[12]  HOERLING A, SJLN J, WILLMANN H, et al. Thermal stability, microstructure and mechanical properties of Ti1-xZrxN thin films[J].Thin Solid Films, 2008,516(18): 6421-6431.
[13]  高玉周,史雅琴,林国强,等. (Ti,Zr)N复合薄膜的微观结构及性能[J].大连海事大学学报, 2002, 28(2): 81-84.
[14]  LIN Y W, HUANG J H, YU G P. Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron sputtering[J].Thin Solid Films, 2010,518(24): 7308-7311.
[15]  MILOEV I, STREHBLOW H H, NAVINEK B. Oxidation of ternary TiZrN hard coatings studied by XPS[J].Surface and Interface Analysis, 1998,26(4): 242-248.
[16]  RANMANA J V, KUMAR S, DAVID C, et al. Structure, composition and microhardness of (Ti,Zr)N and (Ti,Al)N coatings prepared by DC magnetron sputtering[J].Materials Letters, 2004,58(20): 2553-2558.
[17]  PATTERSON A L. The Scherrer formula for X-ray particle size determination[J].Physical Review, 1939,56(10): 978-982.
[18]  YAN P, DENG J X, CUI H B, et al. Finite element analysis of thermal stress in multi-arc ion plated ZrTiN hard coatings[J].Advanced Materials Research, 2010,139-141: 369-373.
[19]  DURUPTHY O, BILL J, ALDINGER F. Bioinspired synthesis of crystalline TiO2: effect of amino acids on nanoparticles structure and shape[J].Crystal Growth & Design, 2007,7(12): 2696-2704

Full-Text

Contact Us

service@oalib.com

QQ:3279437679

WhatsApp +8615387084133