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材料工程  2012 

非对称双极脉冲反应磁控溅射制备TiN/NbN多层膜

, PP. 92-96

Keywords: 纳米多层膜,力学性能,调制周期

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Abstract:

采用非对称双极脉冲磁控溅射制备了一系列不同调制周期的TiN/NbN纳米多层膜,利用X射线衍射分析(XRD)、纳米压痕仪、扫描电子显微镜(SEM)表征了薄膜的微观结构、力学性能和断口形貌。结果表明,在调制周期为19.86nm时,纳米压痕硬度达到43GPa。利用三点弯曲法形成裂纹的扩展,并观察到了裂纹的偏转特征。

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