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材料工程  1999 

提高溅射沉积MoS2膜耐磨性的途径及分析

, PP. 44-47

Keywords: 固体润滑,溅射沉积,MoS2膜

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Abstract:

分析了影响气相沉积MoS2膜摩擦学性能的因素,讨论了通过复合膜技术和膜的后处理技术改善MoS2膜性能的途径。

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