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材料工程  2002 

微等离子体氧化法制备钛酸钡陶瓷膜

, PP. 34-37

Keywords: 微等离子体氧化,相组成,元素分布,成膜过程

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Abstract:

用微等离子体氧化法制备出纯相的BaTiO3陶瓷膜,对所得的陶瓷膜进行XRD和EPMA分析。结果表明,膜层中钡钛两种元素分布均匀,无浓度梯度变化。结合实验现象和测试结果,探讨了浓度和电流密度对陶瓷膜的影响,并提出了BaTiO3陶瓷膜成膜过程中的可能反应机制过程。

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