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材料工程  2004 

n-C7H16/CCl4体系CVD-热解炭的形貌与形成机理

Keywords: 热解炭,化学气相沉积,沉积机理

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Abstract:

控制CVD工艺条件得到球状热解炭,通过对沉积中间体的定性分析,证实了此过程中存在“缩聚机理”。运用热力学和晶体成核-长大理论,解释了温度对热解炭形貌和沉积过程的影响。

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