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材料工程  2008 

环境气体对激光烧蚀制备纳米Si晶粒平均尺寸的影响

, PP. 247-250

Keywords: 脉冲激光烧蚀,纳米Si晶粒,平均尺寸,环境气体

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Abstract:

采用脉冲激光烧蚀装置,在不同环境气体下,沉积制备了含有纳米Si晶粒的薄膜。利用扫描电子显微镜(SEM)观察样品的表面形貌,并对晶粒尺寸进行统计分析,发现不同环境气体下,纳米Si晶粒平均尺寸均随衬底与靶的距离增加有着先增大后减小的规律;通过分析比较,同等条件下Ne气环境下制备的纳米Si晶粒平均尺寸最小。

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