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退火温度对La 1-x Ca x MnO 3 薄膜电输运特性的影响

Keywords: LCMO薄膜,退火,氧含量,Mn4+/Mn3+比,金属ˉ绝缘相变

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Abstract:

采用磁控溅射法在STO(001)基片上沉积钙钛矿结构LCMO薄膜,研究了退火温度对LCMO薄膜微结构及电输运特性的影响.研究结果表明,随退火温度的升高,薄膜中氧含量及Mn4+/Mn3+比逐渐升高,LCMO薄膜中的Mn4+/Mn3+比与薄膜中的氧含量有关,当氧含量增大时,Mn4+/Mn3+比相应增大.LCMO薄膜的电阻率随退火温度升高而逐渐减小,而LCMO薄膜的金属ˉ绝缘相变温度随退火温度升高而逐渐升高,经850℃退火处理的LCMO薄膜的金属ˉ绝缘相变温度可达257K.

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