Si图形衬底的制备及半极性GaN生长STUDYOFANISOTROPICETCHINGOFSISUBSTRATE

DOI: 10.6054/j.jscnun.2010.11.011, PP. 0-0

Keywords: KOH溶液,各向异性腐蚀,异丙醇,超声波振动,半极性GaN,硅图形衬底

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