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光纤微机电压力传感器的设计

, PP. 20-24

Keywords: 集成光路,光纤MEMS压力传感器,数值模拟,干涉光强

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Abstract:

设计了一种基于微机电系统(MEMS)的光纤压力传感器,证明了光纤MEMS压力传感器在工作状态下可以由法布里珀罗腔的理论模型进行解释.推导出光纤MEMS压力传感器中硅横膈膜受到的压力与干涉光强的关系表达式.并且对光纤MEMS压力传感器的模型进行数值模拟,得到了传感器制作过程中涉及到的各个物理量的取值,其中腔体半径为300μm、腔体深度为2.42μm、硅横膈膜厚度为23μm.该设计为光纤MEMS压力传感器的加工和制作提供了理论基础.

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