曾睿, 何世东, 龚宇光, 等. PIN型非晶硅薄膜太阳能电池仿真研究[J]. 半导体光电, 2010, 31(3): 367-371. ZENG Rui, HE Shidong, GONG Yuguang, et al. Semicond Optoelectron (in Chinese), 2010, 31(3): 367-371. [2] 赵志明. 非晶硅薄膜太阳能电池及生产设备技术发展现状与趋势[J]. 科技情报开发与经济, 2009, 19(34): 136-138. ZAO Zhiming. Sci-Tech Inform Dev Economy (in Chinese), 2009, 19(34): 136-138. [3] SCHUBERT M B. Low temperature silicon deposition for large area sensors and solar cells [J]. Thin Solid Films, 1999, 337(122): 240-247. [4] YAMAOTO KE, AKIHIKO Nakajima, MASASHI Yoshimi, et al. A thin-film silicon solar cell and module [J]. Res Appl, 2005, 13: 489- 494. [5] KWAK Joonghwan, SEONG Won Kwon, SANG II Park, et al. Microcrystalline silicon solar cell using p-a-Si:H window layer deposited by photo-CVD method [J]. Solar Energy Mater Solar Cells, 2008, 92: 1081-1085. [6] 张溪文. 硼掺杂对非晶硅薄膜微结构和光电性能的影响[J]. 材料科学与工程, 2001, 19: 30-33. ZHANG Xiwen. Mater Sci Eng (in Chinese), 2001, 19: 30-33. [7] 钱祥忠. 非晶硅薄膜光吸收系数的研究[J]. 真空电子技术, 2004(2): 20-22. QIAN Xiangzhong. Vac Electron (in Chinese), 2004(2): 20-22. [8] 沈峰. PECVD法制备P型非晶硅薄膜及多晶硅薄膜[D]. 武汉: 武汉理工大学, 2008. SHEN Feng. Fabrication of p-typed amorphous silicon films and poly-silicon films by PECVD (in Chinese, dissertation). Wuhan: Wuhan University of Technology, 2008. [9] MALEY N, LANNIN J S. Influence of hydrogen on vibrational and optical properties of a-Si1-xHx alloys [J]. Phys Rev B, 1987, 36: 1146- 1149. [10] KIM DoYoung, GOWTHAM M, MYUNG Suk Shim, et al. Polycrystalline silicon thin film made by metal-induced crystallization [J]. Mater Sci Semiconductor Process, 2004, 7: 433-437. [11] 张世斌, 廖显伯, 安龙, 等. 非晶P微晶过渡区域硅薄膜的微区拉曼散射研究[J]. 物理学报, 2008, 5(8): 1811-05. ZHANG Shibin, LIAO Xianbo, AN Long, et al. Acta Phys Sin (in Chinese), 2008, 51(8): 1811-05. [12] 匡跃军, 李伟, 廖乃镘, 等. 用椭偏法研究掺磷a-Si:H薄膜的光学特性[J]. 半导体光电, 2007, 28(6): 829-832. KUANG Yuejun, LI Wei, LIAO Naiman, et al. Semicond Optoelectron (in Chinese), 2007, 28(6): 829-832. [13] 何宇亮, 陈光华, 张仿清. 非晶态半导体物理[M]. 北京: 高等教育出版社, 1989: 140-185. HE Yuliang, CHEN Guanghua, ZHANG Fangqing. Amorphous Semiconductor Physics (in Chinese). Beijing: Higher Education Press, 1989: 140-185. [14] 阳生红, 李辉酋, 张曰理, 等. Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究[J]. 无机材料报, 2001, 16(2): 305-310. YANG Shenghong, LI Huiqu, ZHANG Yueli, et al. J Inorg Mater (in Chinese), 2001, 16(2): 305-310. [15] 陈红. 氢化纳米硅薄膜的光学常数和室温可见光发光研究[D]. 上海: 上海交通大学, 2006. CHEN Hong. Study on optical constants and room-temperature visible luminescence of hydrogenated nanocrystalline silicon thin films (in Chinese, dissertation). Shanghai: Shanghai Jiao Tong Universtity, 2006. [16] 陈永生, 郜小勇, 杨仕娥, 等. 掺磷硅薄膜的微结构及电特性研究[J]. 压电与声光, 2006, 28(6): 733-735. CHEN Yongsheng, GAO Xiaoyong, YANG Shie, et al. Piezoelect Acoustoopt (in Chinese), 2006, 28(6): 733-735.
