？ LUCIO-LOPEZ M A, LUNA-ARIAS M A, MALDONADO A, et al. Preparation of conducting and transparent indium-doped ZnO thin films by chemical spray [J]. Sol Energy Mater Sol Cells, 2006, 90: 733–741.
[2]
？ LEE C, LIM K, SONG J. Highly textured ZnO thin films doped with indium prepared by the pyrosol method [J]. Sol Energy Mater Sol Cells, 1996, 43: 37–45.
[3]
？ BENOUIS C E, BENHALILIBA M, JUAREZ A S, et al. The effect of indium doping on structural, electrical conductivity, photoconductivity and density of states properties of ZnO films [J]. J Alloy Compd, 2010, 490: 62–67.
[4]
？ WIENKE J, BOOJJ A S. ZnO:In deposition by spray pyrolysis-Influence of the growth conditions on the electrical and optical properties [J]. Thin Solid Films, 2008, 516: 4508–4512.
[5]
？ WIENKE J, ZANDEN B V, TIJSSEN M, et al. Performance of spray-deposited ZnO:In layers as front electrodes in thin-film silicon solar cells [J]. Sol Energy Mater Sol Cells, 2008, 92: 884–890.
[6]
？ LOOK D C. Recent advances in ZnO materials and devices [J]. Mater Sci Eng B, 2001, 80: 383–387.
[7]
？ MULLER J, RECH B, SPRINGER J, et al. TCO and light trapping in silicon thin film solar cells [J]. Solar Energy, 2004, 77: 917–930.
[8]
？ DEWALD W, SITTINGER V, WERNER W, et al. Optimization of process parameters for sputtering of ceramic ZnO:Al2O3 targets for a-Si:H/μc-Si:H solar cells [J]. Thin Solid Films, 2009, 518: 1085–1090.
[9]
？ SITTINGER V, RUSKE F, WERNER W, et al. ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells [J]. Thin Solid Films, 2006, 496: 16–25.
[10]
？ FAY S, STEINHAUSER J, OLIVEIRA N, et al. Opto-electronic pro- perties of rough LP-CVD ZnO:B for use as TCO in thin-film silicon solar cells [J]. Thin Solid Films, 2007, 515: 8558–8561.
[11]
？ CHEN X L, GENG X H, XUE J M, et al. Temperature-dependent growth of zinc oxide thin films grown by metal organic chemical vapor deposition [J]. J Cryst Growth, 2006, 296: 43–50.
？ EL MANOUNI A, MANJON F J, MOLLAR M, et al. Effect of aluminium doping on zinc oxide thin films grown by spray pyrolysis [J]. Superlattices Microstruct , 2006, 39: 185–192.
[15]
？ GOMEZ H, OLVERA M DE LA L. Ga-doped ZnO thin films: Effect of deposition temperature, dopant concentration, and vacuum-thermal treatment on the electrical, optical, structural and morphological pro- perties [J]. Mater Sci Eng B, 2006, 134: 20–26.
[16]
？ PAWAR B N, CAI G, DUKHO H, et al. Preparation of transparent and conducting boron-doped ZnO electrode for its application in dye-sensi- tized solar cells [J]. Sol Energy Mater Sol Cells, 2009, 93: 524–527.
