?封先峰, 陈治明, 蒲红斌. 6H-SiC单晶锭边缘多晶环的控制[J]. 人工晶体学报, 2010, 39(5): 1124–1140. FENG Xianfeng, CHEN Zhiming, PU Hongbin. J Synth Cryst (in Chinese), 2010, 39(5): 1124–1140. [2] ?YANO T, MIYAZAKI H, AKIYOSHI M, et al. X-ray diffractometry and high-resolution electron microscopy of neutron-irradiated SiC to a fluence of 1.9 × 1027 n/m2 [J]. J Nucl Mater, 1998, 253: 78–86. [3] ?VOLINSKY A, GINZBURSKY L. Irradiated cubic single crystal SiC as a high temperature sensor [C]// WANG Lu-Min ed. Radiation Effects and Ion-Beam Processing of Materials. Boston , MA , USA : Materials Research Society, 2004, 792: 273–278. [4] ?郭常霖. α-SiC晶体中的位错[J]. 物理学报, 1982, 31(11): 1511–1525. GUO Changlin. Acta Phys Sin (in Chinese), 1982, 31(11): 1511–1525. [5]? 郭常霖. β-SiC外延层中晶体缺陷的观察[J]. 物理学报, 1982, 31(11): 1526–1533. GUO Changlin. Acta Phys Sin (in Chinese), 1982, 31(11): 1526–1533. [6] ?SICHE D, KLIMM D, H?LZEL T, et al. Reproducible defect etching of SiC single crystals [J]. J Cryst Growth, 2004, 270: 1–6. [7] ?杨莺, 陈治明. 湿法腐蚀工艺研究碳化硅晶体缺陷表面形貌[J]. 人工晶体学报, 2008, 37(3): 634–638. YANG Ying, CHEN Zhiming. J Synth Cryst (in Chinese), 2008, 37(3): 634–638. [8]? 刘忠良, 康朝阳, 唐军, 等. 衬底温度对Al2O3(0001)表面外延6H-SiC薄膜的影响[J]. 硅酸盐学报, 2011, 39(2): 306–311. LIU Zhongliang, KANG Zhaoyang, TANG Jun, et al. J Chin Ceram Soc, 2011, 39(2): 306–311. [9] ?阮永丰, 张兴, 马鹏飞, 等. 一种以中子辐照的碳化硅晶体为传感器的测温方法[P]. CN Patent, 200910069820. 2009–12–09. RUAN Yongfeng, ZHANG Xing, MA Pengfei, et al. A method of temperature measurement using sensor based on neutron-irradiation silicon carbon [P]. CN Patent, 200910069820. 2009–12–09. [10] ?赵敬世. 自动图像分析中计算位错密度的一个公式[J]. 物理测试, 1992, 3: 55–57. ZHAO Jingshi. Phys Exam Testing (in Chinese), 1992, 3: 55–57. [11]? SAKWE S A, STOCKMEIER M, HENS P, et al. Bulk growth of SiC-review on advances of SiC vapor growth for improved doping and systematic study on dislocation evolution [J]. Phys Status Solidi (b), 2008, 245(7): 1239–1256. [12]? JACOBSON H, BIRCH J, HALLIN C, et al. Doping-induced strain in N-doped 4H-SiC crystals [J]. Appl Phys Lett, 2003, 82(21): 3689–3691. [13]? 阮永丰, 马鹏飞, 贾敏, 等. 中子辐照6H-SiC晶体中的钉扎效应[J]. 人工晶体学报, 2009, 38(6): 1309–1319. RUAN Yongfeng , MA Pengfei, JIA Min, et al. J Synth Cryst (in Chinese). 2009, 38(6): 1309–1319. [14]? YAMAZAKI S, YAMAYA K, IMAI M, et al. Analysis of recovery process of neutron-irradiation-induced defects in α-SiC by isothermal annealing up to 1 400 ℃[J]. J Nucl Mater, 2007, 367–370: 692–697. [15]? SAWABE T, AKIYOSHI M, ICHIKAWA K, et al. Microstructure of heavily neutron-irradiated SiC after annealing up to 1 500 ℃[J]. J Nucl Mater, 2009, 386–388: 333–337. [16]? HEERA V, PROKERT F, SCHELL N, et al. Density and structural changes in SiC after amorphization and annealing [J]. Appl Phys Lett, 1997, 70(26): 3531–3533. [17]? SEITZ C, MAGERL A, HOCK R. et al. Defect structures in neutron irradiated 6H-SiC studied by X-ray diffraction line profile analysis [C]// Symposium on Processing and Devices of Silicon Carbide-Materials, Boston, MA, USA, 2000: H 6.4.1 .