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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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一种利用层错无损测量4H-SiC外延层厚度的方法
Abstract:
介绍了一种利用层错无损测量4H-SiC半导体材料外延层厚度的方法。该方法是根据4H-SiC同质外延生长中堆垛层错(stackingfault,SF)和外延层厚度的几何关系,通过测量在场发射扫描电子显微镜下观测到的SF沿[1100]方向边长的长度,计算出外延层厚度。与常用外延层厚度测量方法(红外干涉法)相比,这种无损测量方法更为简易精确。
| [1] | 王玉霞,何海平,汤洪高.宽禁带半导体材料SiC研究进展及其应用[J].硅酸盐学报,2002,30(3):372-380.WANG Yuxia,HE Haiping,TANG Honggao.J Chin Ceram Soc(in Chinese),2002,30(3):372-380. [2]CHEN B,CHEN J,SEKIGUCHI T,et al.Electron-beam-induced current study of stacking faults and partial dislocation in4H-SiC Schottky diode[J].Appl Phys Lett,2008.93:033514-1. [3]MIYANAGI T,TSUCHIDA H,KAMATA I,et al.Annealing effects on single Shockley faults in4H-SiC[J].Appl Phys Lett,2006.89:062104-1. [4]孙以材.半导体测试技术[M].北京:北京冶金工业出版社,1984:191-195.SUN Yicai.Testing Technology on Semiconductor(in Chinese).Bei-jing:Beijing Metallurgy Industry Press,1984:191-195. [5]陈莉,徐军,苏犁.场发射环境电子显微镜上阴极荧光谱仪特点及其在锆石研究中的应用[J].自然科学进展,2005,15(11):1403-1404.CHEN Li,XU Jun,SU Li.Prog Nat Sci(in Chinese),2005,15(11):1403-1404. [6]许振嘉.半导体检测与分析[M].第二版,北京:科学出版社,2007:247页XU Z J.Testing and Analysis on Semiconductor(in Chinese).2th ed.Beijing:Scientific Press,2007:p245. [7]CHUNG H J,LIU J Q,SKOWRONSKI M.Stacking fault formation in highly doped4H-SiC epilayers during annealing[J].Appl Phys Lett,2002,81(20):3759-3761. [8]MAXINENKO S I,SUDARSHAN T S J.Stacking fault nucleation sites in diffused4H-SiC p-i-n diodes[J].Appl Phys,2005,97:074501-1-6. [9]FUJIWARA H,KIMOTO T,TOJO T,et al.Characterization of in-grown stacking faults in4H-SiC(0001)epitaxial layers and its im-pacts on high-voltage Schottky barrier diodes[J].Appl Phys Lett,2005,87:051912-1-2. [10]LIU K X,STANHLBUSH R E,LEW K K,et al.Examination of in-grown stacking faults in8°-and4°-offcut4H-SiC epitaxy by pho-toluminescence imaging[J].J Electron Mater,2008,37:730-735. [11]IZUMI S,TSUCHIDA H,KAMATA I,et al.Structural analysis and reduction of in-grown stacking faults in4H-SiC epilayers[J].Appl Phys Lett,2005,86:202108-1-3.
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