WANG Yuxia, HE Haiping, TANG Honggao. J Chin Ceram Soc, 2002, 30(3): 372-381.
[3]
NIGAM S, KIM J, REN F, et al. High energy proton irradiation effects on SiC Schottky rectifiers [J]. Appl Phys Lett, 2002, 81(13): 2385-2387.
[4]
BRUZZI M, LAGOMARSINO S, NAVA F, et al. Characterization of epitaxial SiC Schottky barriers as particle detectors [J]. Diam Relat Mater, 2003, 12: 1205-120?.
ZHOU Lihong, ZHANG Chonghong, YANG Yitao, et al. Annealing behavior of damage induced by ion-irradiated 4H-SiC [C]//The First Session on China Nuclear Technology and Applications Research Symposium, Beijing, 2006: 51.
[7]
WANG P F, RUAN Y F, HUANG L, ZHU W. Nitrogen-promoted formation of graphite-like aggregations in SiC during neutron irradiation [J]. J Appl Phys, 2012, 111: 063517(1-5).
CHEN Jing, RUAN Yongfeng, LI Liangang, et al. J Chin Ceram Soc., 2013, 41(6): 812-819.
[14]
SNEAD L L,ZINKLE S J, HAY J C, et al, Amorphization of SiC under ion and neutron irradiation[J]. Nucl Instrum Methods Phys Res B, 1998, 141: 123-132.
[15]
JIN E Z, NIU L S. Crystalline to amorphous transition in silicon carbide under neutron irradiation[J]. Vacuum, 2012, 86: 917-923.
[16]
SNEAD L L, HAY J C. Neutron irradiation induced amorphization of silicon carbide[J]. J Nucl Mater, 1999, 273: 213-220.
[17]
YANO T, MIYAZAKI H, AKIYOSHI M, et al. X-ray diffractometry and high-resolution electron microscopy of neutron-irradiated SiC to a fluence of 1.9×1027 n/m2 [J]. J Nucl Mater, 1998, 253: 78-86.
[18]
沈学础. 半导体的光学性质[M]. 北京:科学出版社, 1992: 60-65.
[19]
SORIEUL S, COSTANTINI J M, GOSMAIN L, et al. Study of damage in ionirradiated α-SiC by optical spectroscopy[J]. J Phys: Condens Matter, 2006, 18: 8493-8502.
[20]
SCHNEIDER J, MAIER K. Point defects in silicon carbide[J]. Physica B: Condens Matter, 1993, 185: 199-206.
[21]
KAWASUSO A, ITOH H, OKADA S. Annealing processes of vacancy-type defects in electron-irradiated and as-grown 6H-SiC studied by positron lifetime spectroscopy [J]. J Appl Phys,1996, 80: 5639-5645.
WANG Pengfei, RUAN Yongfeng, HOU Beibei, et al. J Chin Ceram Soc, 2013, 41(3): 353-358.
[24]
GAO F , WEBER W J, Recovery of close Frenkel pairs produced by low energy recoils in SiC [J]. J Appl Phys, 2003, 94(7): 4348-4356.
[25]
WEBER W J, JIANG W, THEVUTHASAN S, Accumulation, dynamic annealing and thermal recovery of ion-beam-induced disorder in silicon carbide[J]. Nucl Instrum Methods Phys Res B, 2001, 175/177: 26-30.
[26]
ZOLNAI Z, SON N T, MAGNUSSON B, et al, Annealing Behaviour of vacancy-and antisite-related defects in electron-irradiated 4H-SiC[J]. Mater Sci Forum, 2004, 457/460: 473-476.
[27]
LING C C, CHEN X D, BRAUER G, et al, Deep-level defects in n-type 6H silicon carbide induced by He implantation[J], J Appl Phys, 2005, 98(4): 043508(1-7).
[28]
ARPIAINEN S, SAARINEN K, HAUTOJ-RVI P. Optical transitions of the silicon vacancy in 6H-SiC studied by positron annihilation spectroscopy[J]. Phys Rev B, 2002, 66:075206(1-10)
[29]
方书淦,张启仁. 晶体色心物理学[M]. 上海:上海交通大学出版社, 1985: 1-3.
[30]
HORNOS T, SON N T,JANéN? E, GALI A. Theoretical study of small silicon clusters in 4H-SiC[J]. Phys Rev B, 2007, 76: 165209(1-6).
[31]
KAWASUSO A, REDMANN F, KRAUSE-REHBERG R. Vacancies and deep levels in electron-irradiated 6H SiC epilayers studied by positron annihilation and deep level transient spectroscopy[J]. J Appl Phys, 2001, 90(7): 3377-3382.
[32]
REMPEL A A, SCHAEFER H E. Irradiation-induced atomic defects in SiC studied by positron annihilation[J]. Appl Phys A, 1995, 61: 51- 53.
LING Zhicong, CHEN Xudong, FENG Hanyuan, et al. Res News (in Chinese), 2004, 33(11): 786-790.
[35]
S-RMAN E, SON N T, CHEN W M, et al. Silicon vacancy related defect in 4H and 6H SiC[J]. Phys Rev B, 1999,61(4): 2613-2620.
[36]
BENYAGOUB A, AUDREN A. Study of the damage produced in silicon carbide by high energy heavy ions [J]. Nucl Instrum Methods Phys Res B, 2009, 267: 1255-1258.
[37]
OKADA M, ATOBE K, NAKAGMA M, et al. Irradiation temperature dependence of production efficiency of defects induced in neutron-irradiated silicon carbides [J]. Nucl Instrum Methods Phys Res B, 2000, 166/167: 399-403.