OALib Journal期刊
用Cr/Au/Ni/Au制备n-GaN欧姆接触
Keywords: n-GaN材料 ,欧姆接触 ,接触电阻率
Abstract:
为了获得n-GaN的低接触电阻的欧姆接触,采用Cr/Au/Ni/Au金属化系统与n—GaN形成欧姆接触,并对其不同温度下的接触电阻率进行了测试分析.室温下Cr/Au/Ni/Au的接触电阻率为0.32mΩ·m2。随着温度的升高,接触电阻率略有增加,在300℃时接触电阻率为0.65mΩ·cm2,因此此欧姆接触适合在高温下使用.
References
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