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500V沟槽阳极LIGBT的设计与优化

Keywords: 沟槽,横向绝缘栅双极晶体管,击穿电压,导通压降,阈值电压,特征导通电阻

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Abstract:

介绍一种双外延绝缘体上硅(silicononinsulator,SOI)结构的沟槽阳极横向绝缘栅双极型晶体管(trenchanodelateralinsulated-gatebipolartransistor,TA-LIGBT).沟槽阳极结构使电流在N型薄外延区几乎均匀分布,并减小了元胞面积;双外延结构使漂移区耗尽层展宽,实现了薄外延层上高耐压低导通压降器件的设计.通过器件建模与仿真得到最佳TA-LIGBT的结构参数和模拟特性曲线,所设计器件击穿电压大于500V,栅源电压Vgs=10V时导通压降为0.2V,特征导通电阻为123.6mΩ.cm2.

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