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类金刚石薄膜的离子注氮研究

Keywords: 离子注入,类金刚石,离子束氮化,氮化碳

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Abstract:

以25~35kV的高能离子柬将离子化的双原子分子N2+注入非晶态碳膜,硬度可提高10GPa量级。分析研究表明:离子注氮并没有改变碳膜的非晶态结构,但所有拉曼结构参数发生变化,且碳、氮结合能峰位发生化学位移;显然注入的氮和碳形成化学键,并可能形成新相。结论:类金刚石薄膜离子注氮可合成氮化的类金刚石,改变化学结构,提高机械性能.

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