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OALib Journal期刊
ISSN: 2333-9721
费用：99美元
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钢表面化学气相沉积TiC晶体的择优取向
, PP. 85-89
Keywords: 择优取向,成膜速度,表面形貌,活性碳的平衡浓度
Abstract:
本文用化学气相沉积(CVD)法,以TiCl_4-CH_4-H_2为原料气体,在不锈钢表面获得了致密的TiC膜.研究了TiC的成膜速度、表面形貌和晶体择优取向与沉积条什的关系.结果表明,沉积温度T_(dep),碳钛比CH_4/TiCl_4强烈地影响了TiC的成膜速度、表面形貌和晶体择优取向.CH_4/TiCl_4低时,TiC晶体的择优取向为(220)而CH_4/TiCl_4高时,TiC晶体的择优取向为(200).TiC晶体的择优取向主要取决于气氛中活性碳的平衡浓度。
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